Beam Scanning and On-demand Switching

On-demand beam-deflection in the X-plane uses plates located just down-stream of the object slits, driven by a high-voltage amplifier triggered by the ADC dead-time logic [1,2].

Scanning the beam on target uses one of two modes. For small scan-areas, the beam is raster-scanned in both X and Y over an area of up to 600 x 200 µm. For larger area scans a hybrid approach using stage stepping in X and scanning in Y yields imaging areas of greater than >5000 x 2000 µm.

[1] C.G. Ryan, D.N. Jamieson, W.L. Griffin, G. Cripps and R. Szymanski, "The New CSIRO-GEMOC Nuclear Microprobe: First Results, Performance and Recent Applications", Nucl. Instr. Meth. B181 (2001) 12-19.

[2] C.G. Ryan, D.N. Jamieson, W.L. Griffin and G. Cripps, "The CSIRO-GEMOC Nuclear Microprobe: A high-performance system based on a new closely integrated design", Nucl. Instr. Meth. B158 (1999) 97-106.